منابع مشابه
Sequencing Wafer Handler Moves To Improve Cluster Tool Performance
Cluster tools can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves determines the time needed to complete a set of wafers. This paper presents scheduling problems for sequential and hybrid cluster tools and reviews the performance of several algorithms.
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ژورنال
عنوان ژورنال: Theatre Research International
سال: 2015
ISSN: 0307-8833,1474-0672
DOI: 10.1017/s030788331400090x